간섭계 대물렌즈 10x, 20x, 50x
접안렌즈 0.55x, 1x, 2x
X, Y Stage range : 300 x 300 mm
Lateral resolution : 0.069 ㎛
Max. Sample Height : 259 mm
Vertical Scan Range : 10.04 mm
Vertical resolution : ≤ 0.1 nm
Sample stage tilt : ± 4.38˚
Step height accuracy : 0.037% @ #5
RMS Repeatability : 0.0041 nm
Camera Pixel : 1.2 MP
Max. Sample loading capacity : 50 kg
Measurement range reflectivity : 0.1 ~ 100%
Light Source : LED(Green, White)
Turret : Motorized 5 position