- Linear axis travel range(X, Y, Z) : 350, 150, 300 mm
- Rotation axis travel range(B, C) : Bi-directional infinity 360°
- Workpiece(C-axis) Max. speed : 10,000 RPM
- Workpiece swing capacity : ∅750 mm
- Workpiece loading capacity : 102 kg
- Workpiece motion accuracy : 15 nm
- Rotary table(B-axis) swing capacity : ∅280 mm
- Rotary table positioning accuracy : ±1.0 arc-sec
- Linear axis Programming resolution : 0.01 nm
- Linear axis position feedback resolution : 0.01 nm
- Rotation axis Programming resolution : 0.000,000,1°
- Rotation axis position feedback resolution : 0.01 arc-sec