○ RF Frequency : 40MHz
○ Type : Free running
○ Plasma tail removal :　Air
○ Resolution : ≤ 0.006 nm
at 200nm
○ Wavelength range :
167 – 782 nm
○ RF Power : 1,000 – 1,500,
1W Adjust
○ Power efficiency : > 79%
with < 0.1% variation
○ Peristaltic Pump : 4 channels
○ Optical System : Echelle
○ Focal Length : 400 mm
○ Plasma viewing :
Vertically Dual
○ Detector : Two SCD
○ Library : ≤ 50,000 lines