단원자&가스클러스터이온소스 1 set
1) Gases used : Ar, He
2) Beam energy
Monatomic mode : 500eV to 4keV
Cluster mode : 2 keV to 8 keV
3) Cluster size range : 75 atoms ~ 2,000 atoms
4) Cluster Modes Available
: Four energy modes set up by default for all cluster sizes
(2 keV, 4 keV, 6 keV, 8 keV)
5) Monatomic modes Available
: Five energy modes are set up by default (500eV, 1 keV, 2 keV, 3 keV, 4 keV)
6) Beam deflection
: steerable by electrostatic deflector plates and controlled by electronic scan unit