· Landing voltage
- 20 V – 30 kV SEM
- 500 V – 30 kV FIB
· SEM resolution
- Optimal WD 0.6 nm @ 2–15 kV
0.7 nm @ 1 kV
1.5 nm @ 200 V with beam decleration
- Coincident WD 0.8 nm @ 15 kV
1.2 nm @ 1 kV
· FIB resolution coincident WD
- 4.0 nm @ 30 kV using preferred statistical method
- 2.5 nm @ 30 kV using selective edge method
·WDS Energy Range : 150 eV ~ 10 keV