1. FIB basic unit
○ Electron optics
– Electron Beam Resolution
• 0.6 nm at 15kV ~ 2kV landing energy or better
• 1.0 nm at 1kV or better
– Landing energy : 20 V to 30 kV or better
– Beam current : 0.8pA~ 100nA or better
○ Ion optics
– Ion Beam Resolution
• 2.5 nm at 30kV using selective edge method
– Accelerating voltage : 500 V to 30 kV
– Beam current : 0.1pA to 100nA (15 position aperture strip)
– Liquid Gallium ion emitter with two-stage differential pumping
○ Scanning system
High-resolution digital scanning engine controlled from the user interface
– Resolution
• 512x442, 1024x884, 2048x1768, 4096x3536 pixels (conventional)
• 768x512, 1536x1024, 3072x2048, 6144x4096 pixels (wide screen)
– Minimum dwell time: 25 ns / pixel
– Electronic scan rotation by n x 360 degrees
○ Vacuum system
This FIB system must have complete oil free vacuum system
– 1 x 210l/s turbo molecular drag pump
– 1 x PVP (dry pump)
– 4 x IGP (total for electron column & ion column)
– Chamber vacuum: < 2.6 x 10-6 mbar
○ Chamber
– E-beam and I-beam coincidence point at analytical WD
– Chamber inner size 379mm(Ø) or bigger
– 21 ports or bigger

2. NanoManipulator system
○ Embedded SW controlled sample lift out manipulator system and rotation
- Drift : <50nm / min
- Smallest step size : 50nm
- True Z movement over 5um move :<500nm
- Vibration : <15nm
- Omnidirectional repeatability : <±150nm
- Motorized Rotation
3. Stage system
- X, Y: 110mm or bigger
- Z: 65 mm motorized or bigger
- Tilt : -15° ~ + 90° or bigger
- Rotation : n×360°
- X, Y repeatability 1µm
4. Detectors
- In-lens SE and BSE detector
- Everhart-Thornley Secondary electron detector
- In-column detectors: Low and high energy loss detection
- IR Camera view in the chamber
- Chamber integrated Navigation camera
- Retractable solid state Backscatter detector
- Plasma cleaner system(software operation in UI)
5. Gas injection system
- Platinum and carbon GIS system
６．SDD EDS 60M (129 eV)
- EDS detector for small dual beam chamber SEM
- Active area of 60 mm2　and　129eV　energy　resolution　at　Mnk-alpha
- Norvar window with proprietary evacuated tube design for detection sensitivity to Be
- Analyzer electronics with up to 1,000,000 x-ray input counts per second and 300,000 x-ray output counts per second.
- Motorized slide for software controllable insertion / retraction.
７. Accessories
- Air compressor
- EMI UPS system
- Water Chiller system
８. System control & software
- 64-bit Graphical User Interface with Windows operation system, keyboard, optical mouse
- Microscope Control Computer
• Intel Workstation Processor
• 2.66 GHz or better- 500 GB system hard drive
• 12 GB RAM- Firewire and Ethernet support
- Three 24 inch LCD displays, WUXGA 1920 x 1200
- Support PC with Windows7 & software controller share one keyboard and mouse
- The stage can be controlled through the user interface