● Laser
- Fundamental wavelength : 1035 ± 5 nm
- Max. average rated output : 60 W
- Pulse frequency : Single-shot to 1 MHz
- Pulse energy : max. 80 uJ (at 750 kHz)
- Pulse width : < 400 fs
● X-axis
- Resolution: 0.1 µm
- Repeatability:± 1 µm
● Rotary axis
- Resolution: 0.005°(=0.07µm on OD1.6 mm tube)
- Repeatability:± 0.0125°