1. Semiconductor Automatic Test System
1) Sensor Test System
2) Digital & Low Power Pin Electronics
(1) 128ch Analog with LF Digital
Analog : -1.5/+10V; ±32mA ; Digitizer 125ksps
Digital : 5MHz; 10Mbps ; -1.5/+10V; ±50mA
(2) 128ch Digital with PPMU (per-pin measure unit) (-1/+6.5V, 60MHz)
Analog : -1.5/+10V; ±32mA ; Digitizer 125ksps
Digital : 60MHz; 120Mbps ; -1/+6.5V; ±40mA

2. Environment Stimulus
1) Environment Sensor Test Units
(1) 14 sites per chamber
(2) Thermal Conditioning Units : 0℃ to +80℃
(3) Absolute Pressure Range : 0.03 to 0.13 MPaA
2) Function(기능)

3. Humidity Generator & Mirror
1) Humidity Generator
(1) Frost/dew point : -20~20 °C
(2) Relative humidity : 15~95 %rh
(3) Dew point stability : ≤ ± 0.02 °C
(4) RH stability : ≤ ± 0.1 %rh
(5) Pressure stability : ≤ ± 1 mbar (0.015 psia)
(6) Saturator temperature stability : ≤ ± 0.01 °C
(7) Flow control : ≤ ± 0.1 l/min
(8) Response time : 15~80 %rh < 5 min
2) Dew Point Mirror
(1) Frost/Dew Point
- Min./Max. expected range of use : -60~+20 °C
- Calibrated range : -50~+20 °C
- Temperature : -50~+100 °C
- Sample Pressure : 0~2500 mbar
(2) Accuracy
- Frost/Dew point (over calibrated range) : ≤ ± 0.1 °C
- Temperature : ≤ ± 0.07 °C
(3) Reproducibility
- Frost/Dew point : ≤ ± 0.05 °C
- Temperature : ≤ ± 0.04 °C
(4) Precision pressure indicator : (Range : 35-1300mbar)