1) Cassette Loadlock Module
- Substrate size : 6inch to 8inch
- Cassette capacity : ≥ Si wafer 25ea
- Ultimate pressure ≤ 1.0E-1 Torr
2) Transfer Module(Brooks handler / module 포함)
- Chamber type : 4-way angle type or 6-way angle
- Valve : Gate valve only
- Handling capacity : Si wafer 1ea /moving
- Ultimate pressure ≤ 1.0E-1 Torr
3) Deep RIE Module
- RF Bias power : ≥ 300W(Auto Match Unit)
- ICP source : : ≥5KW(Auto or Fixed HN Match Unit)
- Closed Couple Gas Pod : ≥ 6개 line연결
- MFC 구성 : ≥ 6개 line
- Chuck Electrode : ESC clamped type only
- Loading capacity : ≥ Silicon wafer 1ea
- Ultimate pressure ≤ 1.0✕10E-5Torr
4)Dual source ICP-RIE Module
- RF Bias power : ≥ 600W(Auto Match Unit)
- ICP source : : ≥ 3KW(Auto Match Unit)
- Gas box : ≥ 8개 line연결
- Clamping 방법: ESC or Mechanical clamp
- Working Pressure : 1~20mTorr by AP
- Ultimate pressure ≤ 1.0E-5Torr
- Loading capacity : ≥ Silicon wafer 1ea