1) 온도조절장치(TCU) : 2개
- Temperature range : -20℃ ~ 200℃
- Heating power : 15 kW
- Circulation pump : Max. 60L/min
- Heating & Cooling media : Heat Transfer Oil
- Cooling : Chiller(냉동기) 연계형 or 일체형
- Including ports for connection of oil line, cooling water line, brine line

2) 냉동기(Chiller) : 2개
- Temperature range : -20℃ ~ 25℃
- Cooling power : 6.0 kW at -20℃
- Circulation pump : Max. 120L/min
- Cooling media : water / water + glycol mixture or Heat Transfer Oil

3. 감압용 진공 펌프 : 1개
- Screw Dry Type
- Ultimate pressure : 760 ~ 0.015 torr(abs)
- Motor : 15HP 이상, 2P, 380V, 60Hz (Ex d II B T4 )
- Suction flow rate : 300m3/h
- Check valve : 50A
- Flow switch : 15A
- Casing : FCD400 + PFA coated
- Impeller(Rotor) : FCD500 + PFA coated
- Nozzle : suction 80A , discharge 80A