세라믹 기판 및 시트 상에 미세 홀 가공
- FEMTO-LASER source, 20W
- Machine calibration accuracy ＜±1 ㎛
- Process accuracy ＜±2 ㎛
- Materials : Ceramics, hard ceramics and polymers
- Micro drilling of circular, square holes
- Light wavelength nIR 1030㎚
- Precession head 5-axis
(x, y, z, incidence angles αand β)
- Autofocus system
Forcal length measurement device (white light sensor)