○ 하중 범위 : 10 μN ~ 500 mN
○ 온도 범위 : -40 ~ 1,000 ℃
○ 위치 resolution: < 0.002 nm / 하중 resolution: < 3 nN
○ 온도 resolution: < 0.1 ℃
○ Standard: compliant with ISO 14577 and ASTM 2546
○ 위치 resolution: < 0.002 nm / 하중 resolution: < 3 nN
○ 온도 resolution: < 0.1 ℃
○ Standard: compliant with ISO 14577 and ASTM 2546