1. 광학계
1) 전자광학
분해능 : ≤1.0 nm at 15 kV,
≤1.5 nm at 1 kV
가속전압 : 500 V ~ 30 kV
전류 : 2 pA ~ 100 nA
2) 이온광학
이온(일반) : Xe
이온(정밀) : Ar, O, N
또는 동등 성능/방법(미세가공)
이온빔 해상도 : ≤15nm at 30kV
가속전압 : 3 kV ~ 30 kV
빔 전류 : 1.5 pA ~ 2.5 uA
2. 검출기
1) SE/BSE(다음의 모드가 가능할 것)
Everhart-Thornley electron detector
In-lens TLD SE and BSE detoector
Secondary ion detection with charge
reduction system
IR Camera & Chamber integrated
Navigation camera
Beam Deceleration Technology
3. 분석기
1) Heating stage
Max. Heating ramp : ≥ 5°C/S
Temperature Range : R.T. ~ 1500°C
Temperature Stability : 1°C or less
Specimen Size : ≥10 x 10 mm2
2) Tensile stage
Load ranges : 200 N ~ 5,000 N
Specimen : ≥ 60 x 10 x 5 mm
Deformations speed range : 0.5 um/sec
~ 50 um/sec
3) Airlock / Transfer System
Temperature : Ambient
Airlock weight : ≥ 2.5 kg
Pumping : diaphragm pumping system
Maximum specimen size : ≥ 5 mm
4) Energy Dispersive Spectrometer
SDD Detector : 60mm2 active area
Resolution : 129eV or less at Mn kɑ
Maximum input count rate ≥ 1500 kcps
Software : Point & ID, mapping, Linescan,
Trumap(Qmap) 가능
4. 운영장치
1) Software(항목별 분석이 가능할 것)
Analysis & Measurement
Image Processing
3D tomography software
TEM sample preparation
2) System control
64-bit Graphical User Interface
≥ 2.66 GHz, 500 GB system hard drive
Three ≥ 24 inch LCD display
UPS & oil free compressor
재진대
전자기파 차폐 장치