1. 엘립소미터 장비구성
- Light Source
- Polarizer Module
- Controls and Electronics Module
- Analyzer Module
- Software
- PC System
- Spectrometer System
- Auto-Mapping Stage (500 ㎜ X 500 ㎜)
- Auto Z-Axis
- Auto Alignment
- Sample Stage (500 ㎜ X 500 ㎜)
- Calibration sample

2. 장비성능
- Light source : Combined Deuterium(복합중수소)/텅스텐 할로겐 램프
파장범위 240 nm ~ 1,000 nm
- Polarizer Module(편광자 모듈)
Beam Deviation(빔 편차) : 3 arc minutes or less
- Spectrometer(분광계)
파장범위 245 nm ~ 880 nm (CCD Type)
Resolution : 0.45 nm per pixel
- Auto-Mapping Stage
X-Y Auto Mapping system
500 ㎜ X 500 ㎜
Auto 2D, 3D Mapping Software
Automatic Control
- Angle : Fixed angle of incidence 70 deg
- 소프트웨어
Operation & Analysis Software
측정결과/상태/오류이력/표시
Initialization, Calibration, Measurement
다층 모델링
- PC System
- Reference sample(100 nm SiO2)