○ Guaranteed Resolution
- TEM image resolution : 0.25 nm
- STEM resolution : 0.16 nm

○ Electron Source
- Gun type : Schottky FEG
- Max beam current : 50 nA or higher
- Emission stability : 1% per hour
- Spot drift : 1nm / minute

○ Accelerating voltage
- Range : 80 / 200kV or wider
- Minimum kV increment Continuous
- Voltage stability (DC-100kHz) : 1 ppm / 10min

○ Objective lens
- Information limit : 0.12nm
- Focal length : 1.7mm
- Lens current stability : 1ppm/min
- Residual astigmatism Maximum : 1.5um

○ EDS Detectors
- Resolution : 136eV Mn-K @ OCR 100 kcps
- Detector : 120mm2 active area with
- Detectable elements : Be(4) - U(92)

○ Specimen Stage
- Max. Eucentric tilt : +40° ~ -40° or wider
- Maximum goniometer (stage) tilt angle : ±90˚ or wider
- Specimen drift rate : 0.5 nm/min attainable or less
- Piezo stage included

○ 4 x 4 16M Camera
- This Camera is 16-mega pixel digital camera designed for imaging and diffraction applications. This Camera is retractable and mounted under the microscope in an on-axis position. The optimized phosphorous scintillator is fiber optically coupled to a 4k x 4k, 14 x 14 µm2pixel Peltier cooled CMOS sensor.
- Sensor: 4,096 x 4,096 CMOS or more
- Pixels: 14 x 14 µm2 or less
Enhanced or more
- 4k x 4k: 40 fps
- 2k x 2k: 80 fps
- 1k x 1k: 160 fps
- 512 x 512: 320 fps

○ Imaging system
- Magnification range : 25 x – 1,000 kx
- STEM magnification range : 150 x - 10 Mx
- Diffraction camera lenth range : 30 – 2,000 mm
- Coma-free alignment for high-resolution objective lens centering
- Continuous focus and objective-lens current read-out

○ Holder
- CompuStage Single-tilt Holder
- High-visibility Low-background Double-tiltHolder
- Tomography Holder (High Field of View)
- Analytical Tomography Holder

○ Accessory
- Water chiller
- compressor(Oil free)
- Sample preparation Accessory