1. Laser system
1) Laser type : Nanosecond laser
2) Average power : 1kW
3) Wavelength : 1030nm
4) Pulse Duration : 30ns
5) Pulse Energy : 100mJ
6) Max. Repetition rate : 50kHz

2. 5-axis stage
1) Axis : 5 axis
2) Processing area : 250mm x 250mm
3) Linear scale : ± 15㎛
4) Repeatability :
- X축, Y축 : ±1㎛ 이하
- Z축 : ±2㎛ 이하
5) Accuracy
- X축, Y축 : ±2㎛ 이하
- Z축 : ±5㎛ 이하