◦ 기판 종류/크기 : Glass, wafer/370x470
◦ 광학계
- 1x Tube Lens
- White LED
- 2파장 Cut filter
- Wave Selector (3 wave length)
- Focus time ≤1sec
- Objective Lens M Plan 5X, 10X, 20X, 50X

◦ 레이저
- Pulsed Diode Pump laser
- IR(< 16mJ), Green (<6mJ), UV(<3mJ)
- Pulse Duration : <14ns
- Frequency : 1Hz~100Hz
- Beam Divergence : < 9mrad
- Cooling : 공냉식
- View camera : Color 2M Pixels