Thermo Fisher Scientific
NEXSA
10년
주장비
분석
화합물 전처리·분석장비 > 분광분석장비 > X-선광전자분광기
2021-12-29
1,083,313,490원
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[Hr] 65,000원
X-선 광전자 분광법 (X-ray Photoelectron Spectroscopy)으로 샘플 표면에 조사된 X-선의 에너지에 의하여 샘플 원자 내부의 코어 레벨에서 방출된 광전자를 활용하는 장비. 광전자의 운동에너지를 측정함으로써 표면에 존재하는 원소의 종류와 조성비, 그리고 각 원소의 화학결합 및 산화상태 분석이 가능한 장비
1. Microfocussed X-ray source
2.1 Type : Microfocussed x-ray beam
2.2 Min. Spot size: ≤ 10 ㎛
2.6 Max. Power: ≤ 100 W
2. Electron analyser with Lens system
2.1 Ultimate Energy resolution (of Ag 3d5/2 peak) : ≤0.5 eV FWHM
2.2. XPS on Insulators : C 1s energy resolution (eV) : ≤0.85 eV
2.3 Detector : 128-channel detector or more
2.4 Max. Sensitivity at 1eV FWHM on Ag3d5, at 400 μm : 2,000,000 cps, or more
3. UHV Analysis chamber
3.1 Material : UHV compatible chamber
3.2 Ultimate vacuum : 5×10-9 mbar or less
4. Monoatomic & Cluster ion gun
4.1 Ion Beam Energy : 0.2 ~ 4 keV
4.2 Cluster Ion Gun gas: : Ar
6. Specimen stage
6.1 Stage Axis:: X, Y, Z, R, T
6.2 Maximum specimen dimensions : 60 x 60mm or bigger
6.3 Multi-specimen mounting plates : two or more
7. Data System & Software
7.1 : Windows based PC, Monitor, Color Printer
7.2 Data System Software
1) Full Control of main system
- Live data display and processing
2) Data processing Software
- Spectrum Analysis, Modification, Processing, Overlay/Comparison
- NLLS Fitting and TFA
8. Bakeout Facility
- upto 100 oC or more
9. Charge Neutralization unit
- Type : combined dual-beam low energy electron / low energy ion source
10. Vacuum Transfer Vessel
- Sample holder allowing samples to be transferred under vacuum into the system
11. Sample viewing facility
- Viewing at Sample loading chamber &Analysis chamber: 2 or more