FEI
SCIOS
11년
주장비
시험
광학·전자 영상장비 > 현미경 > 주사전자현미경
2020-12-21
686,170,550원
기관의뢰
고정형
건별
300,000원
○ Electron 및 Ion 의 두 개의 column으로 이루어 진 Dual Beam system이 적용 된 장비이며, Ga source를 활용한 집속 이온 빔의 식각 특성을 활용하여 Sub-Micro & Sub-Nano의 미세 영역을 가공 및 분석하는 장비
○ 장비를 이용한 특정 영역의 가공 및 이미지 관찰이 용이하며 가공한 샘플을 chamber 내부에서 SEM을 활용하여 직접적으로 imaging 분석 및 EDS를 활용한 성분분석, EBSD, STEM을 활용한 결정구조분석에 아주 탁월한 기능
Electron optics
1) Electron Beam Resolution
- 1.0nm at 15 kV SE resolution or less
- 1.6nm at 1 kV SE resolution or less
2) Accelerating voltage : 20 V to 30 kV or wider
3) Magnification : 8x to 1,280Kx or wider
4) High stability Schottky thermal field emitter and available unicolor optics.
5) Heated objective apertures to extend aperture lifetime
Ion beam resolution
1) 3 nm at 30 kV(65nA) or less
Field emission gun
1) Probe current: 1pA to 400nA or wider
High Throughput ion column optics
1) High-current ion column with Ga liquid-metal ion source for use in
high vacuum
2) Acceleration voltage: 0.5 to 30 kV or wider
3) Probe current: 1.5 pA to 65 nA or wider
4) Lowest voltage (500 V) for ultimate sample preparation quality
5) Beam blanker standard, external control possible
6) 15-position aperture strip
7) Magnification: 40x to 1280Kx
8) Charge neutralization mode for milling of non-conductive samples
must be included
9) Stability of Ga ion Beam : within 3% / 24 hour
10) Drift of Ga ion Beam : within 10nm / 10min
Detector
1) Everhart-Thornley Secondary electron detector
2) IR Camera
3) Chamber integrated Navigation camera
4) Retractable solid state Backscatter detector
5) In-column detector
Chamber vacuum
1) Pump-down time for sample exchange: < 210 Seconds
2) High vacuum: < 6.3 x 10-6mbar
Vacuum system
This FIB system must have complete oil free vacuum system
1) 1 x turbo molecular drag pump
2) Scroll pump : oil-free
3) Electron column : 2 x Ion getter pumps
4) Ion column : 1 Ion getter pump
Chamber
1) E- and I-beam coincidence point at analytical WD
2) Chamber inner size 379mm(Ø) or wider
3) 21 ports or higher
Eucentric goniometer stage, 5-axes motorized
1) X, Y : 110mm or wider
2) Z: 65 mm motorized or higher
3) Minimum step size : 100nm or less
4) Tilt : -15° ~ +90° or wider
5) Eucentric tilt
6) Rotation : n×360°
7) Sample weight 500g (up to 2kg at 0° tilt)
8) Maximum clearance : 85 mm at eucentric height
9) Maximum sample size : ~ 150 mm diameter with full rotation
10) Stability of stage : 10nm/min
Full Automated Serial sectioning and imaging software with 3D EDS plug-in
(1) The sequential images captured by automatic 3D software should be
combined with EDS and analytical information.
(2) Acquisition of multiple images with independent settings; resolution,
dwell, FOB, detector, kV for each slice
(3) Project/Job management to save, export and import project parameters
for quicker setup of routine processes
4) Auto images capturing and stitching for high resolution imaging.
System control & software
1) 64-bit GUI with Windows operation system, keyboard, optical mouse
2) Microscope Control Computer
- Intel Workstation Processor
- 2.66 GHz or better- 500 GB system hard drive
- 12 GB RAM- Firewire and Ethernet support
3) Three 24 inch LCD displays, WUXGA 1920 x 1200
4) Support PC with Windows 10 & software controlled switch box for one
keyboard and mouse system control
5) Multi-functional control panel
Image processor & supporting software
1) Dwell time range: 25 ns to 25 ms/pixel
2) 6144 x 4096 pixels
3) 256 frame average or integration, line integration and averaging,
interlaced scanning
4) Automatic drift compensated and frame integration scanning mode
built in
5) Single frame or 4-quad image display
6) Up to 4 simultaneously active display windows for different detectors
7) Color mixing of detector signals
Accessory
Energy Dispersive X-ray Spectrometer
(1) SDD Detector : 40mm2 active area
(2) Resolution : 129eV or less at MnKa
(3) Up to ten times faster than conventional Si detectors
(4) Detecting element range : Be(4) to Cf(98)
(5) Maximum input count rate > 1500kcps
(6) Software : Should be supported quantitative & qualitative analysis,
Point & ID, mapping, Linescan, Trumap.
Acoustic Enclosure for Pre vacuum pump : 1set
Compressor 230V, 50Hz with 4-liter Tank : 1set
Air-cooled Water Chiller 230V, 50/60Hz : 1set
Uninterruptible Power Supply 230V : 1set