- Total magnification : 17,280x
- Height configuration
⋅Measurement range : 37 mm
⋅Display resolution : 0.5 nm
⋅Repeatability : 12 nm
⋅Accuracy : ± 1.5%
- Width configuration
⋅Measurement range : 300 X 300 mm
⋅Resolution : 1 nm
⋅Repeatability : 20 nm
⋅Accuracy : ± 1.5%