Moore Nanotechnology Systems
HDL-2600 V2
10년
주장비
생산
기계가공·시험장비 > 성형/가공장비 > 표면가공기
2021-01-20
2,075,282,745원
없음
- Drum diameter: ≥600㎜
- Drum mass(work piece weight): ≥1500㎏
- Optical cutting zone(travel range): ≥2000㎜
- Machine base: polished fine-grained natural granite for exceptional long-term machine tool stability
- Vibration isolation: pneumatic air isolation system with self leveling
- Bearing: oil hydrostatic
- Distance between chuck front surface: ≥3100㎜
- Z-axis Travel range total: ≥2100㎜
- Z-axis Feedrate(Max. speed): ≥8,000㎜/min
- Z-axis Straightness (horizontal): ≤±2.5㎛/full travel
- Z-axis Positioning accuracy: ≤±1㎛
- Z-axis Feedback(position) resolution: ≤1.0㎚
- X-axis Feedrate(Max. speed): 1,500㎜/min
- X-axis Straightness (horizontal): ≤±1㎛/full travel
- X-axis Feedback(Position) resolution: ≤0.034㎚
- C-axis Runout (radial error motion of spindle @100rpm): ≤0.2㎛ (axial, radial)
- C-axis Positioning accuracy: ≤±2arcsec
- C-axis Position resolution: ≤0.019arcsec
- C-axis Speed: 0-300rpm
- W-axis Runout(motion accuracy @100rpm): ≤0.2㎛
- Optional Equipment: Thermal Monitoring/Management System, Thermal Encloser with Air Shower,
Drum Balancing System, Tool Holder, Lubrication System, Vacuum Chip extraction system,
Optical Tool Set Stati
나노패턴 원통금형 제작을 위한 기초가공 장비로, 길이 2000㎜급 롤 금형을 나노미터급 표면조도와 형상 정밀도로 가공할 수 있는 장비
- 나노패턴 원통금형 제작 시 나노패턴의 높이 100㎚ 대응을 위해 10배 정도 평탄한 표면이 요구됨. 즉, 20㎚급 표면조도(Ra) 및 100㎚급 회전 정밀도(Run-out)
기관의뢰 직접사용 임대가능
고정형
시간별
108,000원
나노패턴 원통금형 제작을 위한 기초가공 장비로, 길이 2000㎜급 롤 금형을 나노미터급 표면조도와 형상 정밀도로 가공할 수 있는 장비
- 나노패턴 원통금형 제작 시 나노패턴의 높이 100㎚ 대응을 위해 10배 정도 평탄한 표면이 요구됨. 즉, 20㎚급 표면조도(Ra) 및 100㎚급 회전 정밀도(Run-out)
- Drum diameter: ≥600㎜
- Drum mass(work piece weight): ≥1500㎏
- Optical cutting zone(travel range): ≥2000㎜
- Machine base: polished fine-grained natural granite for exceptional long-term machine tool stability
- Vibration isolation: pneumatic air isolation system with self leveling
- Bearing: oil hydrostatic
- Distance between chuck front surface: ≥3100㎜
- Z-axis Travel range total: ≥2100㎜
- Z-axis Feedrate(Max. speed): ≥8,000㎜/min
- Z-axis Straightness (horizontal): ≤±2.5㎛/full travel
- Z-axis Positioning accuracy: ≤±1㎛
- Z-axis Feedback(position) resolution: ≤1.0㎚
- X-axis Feedrate(Max. speed): 1,500㎜/min
- X-axis Straightness (horizontal): ≤±1㎛/full travel
- X-axis Feedback(Position) resolution: ≤0.034㎚
- C-axis Runout (radial error motion of spindle @100rpm): ≤0.2㎛ (axial, radial)
- C-axis Positioning accuracy: ≤±2arcsec
- C-axis Position resolution: ≤0.019arcsec
- C-axis Speed: 0-300rpm
- W-axis Runout(motion accuracy @100rpm): ≤0.2㎛
- Optional Equipment: Thermal Monitoring/Management System, Thermal Encloser with Air Shower,
Drum Balancing System, Tool Holder, Lubrication System, Vacuum Chip extraction system,
Optical Tool Set Stati