HITACHI
IM5000CTC
10년
주장비
분석
기계가공·시험장비 > 반도체장비 > 식각장비
2019-10-28
231,000,000원
기관의뢰 직접사용
고정형
시간별
30,000원
○ Ar 이온 빔으로 시료 단면을 매끄럽게 연마(식각)해 layer 특성 및 내부를 관찰하는 장비
- 도막 및 multilayer 재료의 내부 defect 및 계면 특성 평가
- Ion Beam을 이용하여 기계적으로 단면을 제작할 수 없는 시료의 단면상을 관찰하기 위한 SEM 시료 전처리 장비
○ Specification
- Ion gun unit
· System : Penning system
· Accelerating voltage : 0 to 8kV
· Discharge voltage : 0 to 1.5kV
· Discharge current : 0 to 560㎂
· Ion beam diameter : about 500㎛
· Ar gas flow control : High accuracy Mass flow control
· Milling rate :
Cross-section milling : over than 1mm/hr on Si at 8kV
Flat milling : 22㎛/hr (Illumination angle : 60˚) - Spot
- Stage for cross-section milling
· X movement : ±7㎜
· Y movement : 0 to +3㎜
· Sample rotation : ±3˚
· Swing angle : ±15˚, ±30˚, ±40˚ (selectable)
· Sample swing spped : OFF + 1 speed
· Max. sample size : 20㎜W x 12㎜D x 7㎜H
· Milling condition control : C1 ~ C9 (selectable)
- Stage for flat milling
· X movement : 0 to 5㎜
· Tilt range : 0 to +90˚
· Sample rotation speed : 1rpm, 25rpm
· Sample swing speed : 1rpm, 10rpm
· Swing angle : ±60˚, ±90˚ (selectable)
· Max. sample size : 50㎜Φ x 25㎜H (Tilt : 0˚ to 90˚)
· Milling condition control : F1 ~ F6 (selectable)
○ Configurations
- Main unit with CTC 1set
- Optical Microscope for sample alignment 1set
- Sample stage for cross-section milling 1set
- Sample stage for flat milling 1set
- Wide Area milling unit 1set
- Rotary pump 1set
- Oil mist trap 1set
- Vibration proof-materials for R.P. 2sets
- Flexible tube 1set
- Service tool kits 1set
- Gloves 1set
- Instruction manual (English version) 1copy
- Specimen stub assy for cross-section milling 5ea
- Mask (5ea/set) 2sets
- Zoom stereo microscope unit for observation of inner chamber 1set