1. Resolution
SE resolution: 1.2nm or less @ 30kV
3.0nm or less @ 1kV
2. Magnification: 18 – 1,000,000X or more
(Based on 800x600 pixel monitor display)

3. System Operation: Microsoft® Windows XP or more
Standard Mouse, Knob-set and Keyboard Operation

4. Electron optics
1) Electron gun: ZrO/W Schottky emission electron gun
2) Accelerating Voltage: 0.5 – 30kV or more (should be adjustable in 100V steps)
3) Landing voltage: 0.1k – 2kV or more (should be adjustable in 100V steps)
4) Beam current: 200nA maximum or more
5) Lens System : Three-stage electromagnetic lens reduction system
6) Astigmatism: Electromagnetic 8-pole X,Y method correcting unit
7) Scanning coil: Two-stage electromagnetic deflection method
8) Objective Lens Aperture: Click stop, strip aperture with five positions or more
(open, 150μm, 70μm, 30μm, and 20μm)
* Aperture Heater should be Standard.
* Position Sensor should be Standard.
9) Beam blanking: Electromagnetic type(beam is blanked when image is frozen)
10) SE Bias Accelerator Plate: Improves SE collection efficiency at low voltages and short working distances
11) Objective Lens: Super conical lens
12) Image Shift: ± 50um or better at 15mm WD

5. Electron optics alignment
Alignment mode: Beam alignment mode
Aperture alignment mode
Stigma alignment mode
Ultra low voltage alignment mode
Auto focus alignment mode
Automated optical axis alignment and astigmatism correction mode

6. Detectors: Everhart-Thornley secondary electron detector (Standard)
Top detector for high resolution imaging through-the-Lens(TTL) or equivalent.

7. Vacuum System
1) Automatic evacuation:
Fully automatic vacuum sequence with pneumatic valves
Failsafe protection against loss of power, air pressure and vacuum
User friendly and accurate computer control of vacuum levels
2) Vacuum pumps:
Two ion-pumps (30 l/s x1, and 20l/s x1) or more
Turbo molecular pump (240 l/s) x1 or more