Quorum Technologies
Q300T D
11년
주장비
생산
기계가공·시험장비 > 반도체장비 > 스퍼터
2016-12-12
46,583,500원
고정형
건별
150,000원
The Q300T D is fully automatic large chamber, dual-head sputter coater ideally suited for thin films applications and for conductive coating of scanning electron microscopy (SEM) specimens.
The dual-head configuration allows two different oxidising or non-oxidisingmetals to be sequentially sputtered without the need to ’break’ vacuum.
A dual channel film thickness monitor option is available.
1. Fully automatic touch screen control - rapid dat input, simple operation
2. Dual sputter head - for sequential sputtering of two different metals, ideal for many thin film applications
3. A wide range of oxidising and non-oxidising targets are available
4. Large chamber format
5. Optional dual channel film thickness monitor (FTM) module
6. Vacuum shut-down feature - leaves the process chamber under vacuum when not in use - improved vacuum performance.
7. Thick film capabilities - up to 60 minutes sputtering time without breaking vacuum