(주)큐엠씨
SLG-100
5년
주장비
생산
기계가공·시험장비 > 성형/가공장비 > 달리 분류되지 않는 성형/가공장비
2016-11-09
539,000,000원
기관의뢰
고정형
시간별
163,000원
자외선기반의 레이저를 사용하여, 건축물의 크랙, 뒤틀림, 진동 검출용 Fiber 센서의 내부 격자 가공과 Reticle 또는 Mask 제작에 사용되는 미세 격자 패터닝에 사용되며, 본 시스템은 자외선기반의 레이저를 사용하여 광학적 포커싱에 의해 격자 패턴을 가공하는 설비입니다
I. 물품 구성(System configuration)
1. KrF Excimer laser 1 set
2. Optics module (Beam delivery module) 1 set
3. Precision stage 2 set
4. Alignment module 1 set
5. Electrical control module (Controller) 1 set
6. System frame (Clean booth type) 1 set
II. 풀품 구성의 성능
1. KrF Excimer laser
1) Beam properties
- Center wavelength : 248nm
- Beam size (FWHM, V × H) : 12mm × 4.5mm
- Divergence (FWHM, V × H) : < 0.3mrad × 0.2mrad
2) Pulse repetition rate and energy
- Maximum repetition rate : 100Hz
- Maximum pulse energy : 140mJ(@ 10Hz)
- Maximum average power : 12W(@ 100Hz)
- Short term energy stability : 1% @ 1σ
- Pulse duration : 20ns
2. Optics module (Square beam system)
1) Beam delivery system
- Working distance(From Mask to Fiber) : Approx. 100µm
- Optical efficiency : Approx. 40%
- Laser safety class : 1 (beam path), 4 behind exit window
2) Attenuator (Motorized version)
- Continuously variable transmission
- Transmission range : 90 ~ 10%
- Attenuator substrate with step motor
3) Telescope lenses (3 cylindrical)
- The telescope is employed in order to match the beam sizes to the mask
- Consisting of 3 lenses (TL1, TL2, TL3)
- AR coated for 248nm
4) Condensing lens module
- Cylindrical plano-convex lens
- AR coated for 248nm
5) Mask holder
3. Precision stage
1) Configuration
- Granite plate with guide 1 set
- X1-X2-Y1-Y2 axes precision stage 1 set
- Theta stage 1 set
- Isolator 1 set
2) Basic specification
- Moving range :
ㆍX1, X2 axes : 400mm
ㆍY1, Y2 axes : 250mm
ㆍZ axis : 50mm
ㆍTheta(θ) axis : ±55°
- Position resolution :
ㆍX1, X2, Y1, Y2, Z axes : 0.1µm
ㆍTheta(θ) axis : 0.1°
- Repeatability :
ㆍX1, X2, Y1, Y2, Z axes : < ±2µm
ㆍTheta(θ) axis : < ±5arc
- Maximum speed :
ㆍX, Y axis : 300mm/s
- Substrate plate :
ㆍVacuum chuck size : max. 100mm × 100mm
ㆍFlatness : < ±5µm
3) Process condition
- Stage scanning type: step or continuous movement
4. Alignment module
1) Configuration
- Vision alignment module 1 set
2) Basic specification
(1) Vision aligner
- Advanced find image algorithm
- High resolution CCD camera : Pixel : 1024 × 768
- High quality lens
5. Monitoring system
1) Configuration
- Power meter 1 set
2) Basic specification
(1) Power meter
- Power detector or power meter
- Power meter is communication monitoring of software (PMC)
6. Electrical control modular
1) Process Module Controller (PMC)
- CPU : IntelⓇ CoreTM i7 3.6GHz
- Memory : 32G
- HDD : 1TB
- VGA : GTX960 2GB
- OS : WindowsⓇ 7 based
2) Motion controller
- Axes : 8 ~ 10
- PCI Card Type
3) Signal interface
- Digital input
- Digital output
4) Signal tower
- 3 color indicator with 1 buzzer : red, yellow, green and 1 beep sound
- Maker : Comply customer’s common specification
- Model : Comply customer’s common specification
7. Wavelength meter
1) Wavelength range
- VIS to mid-IR : 500 ~ 2,250nm
2) Absolute accuracy
- 500 ~ 1,100nm : 3,000MHz
- 1,100 ~ 2,250nm : 2,000MHz
3) Resolution : 1,000MHz
4) Measurement speed
- Max. bandwidth : 50GHz
- Data acquisition : 600Hz
5) Coupling accuracy (with multimode fiber) : 3,000MHz
6) Coupling fiber diameter : 400µm