JEOL
JSM-7100F with TTL
10년
주장비
분석
광학·전자 영상장비 > 현미경 > 주사전자현미경
2015-10-22
74,979,722원
고정형
건별
50,000원
Specifications
1. Performance
1) Resolution
For High Resolution condition: 1.2nm guaranteed at 30 kV or better
2.0nm guaranteed at 1 kV or better
For analytical condition: 3.0nm guaranteed at 15 kV, WD 10mm, 5nA or better
Gentle beam Mode: Built-in
2) Magnification : x10 to x1,000,000 or wider
Magnification preset : User can be switch instantaneously from any
magnification to any preset magnification.
3) Image modes : SEI, BEI
2. Electron Optical System
1) Accelerating voltage : 0.2 to 30 kV or berrer
2) Electron Gun: ZrO/W(100)Shottky type Filament Built-in
3) Gun Bias Auto and Manual mode.
4) Probe current : Up to 2 x 10-7A at 15kV or better
5) Alignment : Mechanical and electromagnetic deflection
(Mechanical alignment by user can not be required)
Features
1. High resolution field emission scanning electron microscope which schottky type FEG for the
electron source should be permited 1.2nm guaranteed resolution at 30 KV and 2.0nm
guaranteed resolution at 1KV and 3.0nm guaranteed analytical condition resolution or better.
2. The Schottky type Field Emission Electron Gun for the electron source should be employed to
display high resolution image and analytical functions.
3. The electron beam probe current should be irradiated to analyze small area from the order
1 x 10-12A order to 2 x 10-7A.
4. The Specimen chamber is designed to introduce a large specimen of 100mm diameter and
40mm Height sample through the Airlock Chamber and also it is designed to enable various
analytical devices such as EDS, WDS, EBSD, E-Beam litho. system and Backscattered
electron detector.
5. For high-resolution observations, employ the GB(Gentlebeam) mode that effectively
suppresses charging in non-conductive specimens such as insulating materials (ceramics, etc.)
and semiconductors. Thus, you can easily observe these specimens.
6. This system should be displayed with 1,280 X 1,024 pixels under graphic user interface
on the Windows7 operation system and also displayed with 19" LCD for image observation.
7. Eucentric stage capability should be performed at the wide working distance to allow
the focus and magnification remains unchanged when the specimen is moved.
8. High probe current elemental analysis should be available to complying the optimum analysis
condition with the variety user demands.
9. To exchange sample in specimen chamber, it is done by one touch chucking type through
Airlock (40mm Height Sample can be loaded).
10. The optimum observation conditions should be stored and set by the built-in customer recipe function.
11. The 5 axes Motor stage should be controlled automatically by the computer. And specimen
position indication should be displayed on the observation screen and each motor(X,Y,R,T,Z).