*주요 구성
1) Microscope section (alignment)
- Pattern matching, kerf check (compensation on a hairline standard, kerf width max/min, check setting of random locations, check settings for each cut line number), auto focus, 7.5x magnification
2) Cutting section
- motor : AC servomotor (X-axis, theta axis), Stepping motor (Y- and Z-axis)
- cutting range : 160 mm (X-axis), 162 mm (Y-axis)
3) Operation section : Touch-sensitive panel, CF card
4) Status indicator : buzzer and flashing of lamps (Red/Yellow/Green)
*주요 성능
1) Accuracy
- Chuck Table Upper Surface Parallelism : 0.005 mm / 150 mm
- Y-axis Index Positioning Accuracy : (Single error) 0.003mm or less/ 5mm
(Positioning accuracy) 0.005mm or less/160mm
- Z-axis Repeatability : 0.001mm (range)