PTLKorea / M-T다(NTIS)
SpinDryer
5년
주장비
생산
기계가공·시험장비 > 반도체장비 > 식각장비
2008-05-26
63,690,000원
직접사용
고정형
건별
10,000원
8300S Spin Rinse Dryer
Spray : on axis orientation allows uniform spray onto the wafers
Clean/Rinse : built-in resistivity monitoring assures an automatic and reliable clean; the process chamber is cleaned with the product, quick ramp S model brushless DC motor provides economy and effienciency.
Dry : centrifugal drying, coupled with heated nitrogen and a low-pressure nitrogen purge through a heated process chamber
구성: Process Chamber 2ea Power Control Unit Utility Supply Unit
Wet Station 세정공정 및 Rinse 공정
제조사 PTLKorea
모델 8300S
사양 up to 8
용도 세정, Wet Etch, 현상 후 건조