1. Cross Section Polisher
1) Accelerating voltage : 2 to 6kV
2) Ion beam diameter : 500 um (FWHM)
3) Milling rate : 100um/H (6 kV, Silicon, 10um from edge)
4) Max. specimen size : 11mm(W) x 10mm(D) x 2mm(T)
5) Specimen stage : X : ± 10mm, Y : ± 3mm
6) Specimen alignment : ± 5 ˚
7) Specimen-rotation angle adjustment angle : ± 30 ˚
8) Gas : Argon
9) Pressure measurement : Penning gauge
10) Pumping system : TMP, RP