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광학·전자 영상장비 > 현미경 > 주사전자현미경
2012-07-09
369,761,713원
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가속된 전자빔을 시료 표면에 주사하여 발생시킨 2차 전자를 탐지하여 고배율로 물직의 표면 형상 정보를 영상으로 나타내어 주면 Energy dispersive spectroscope를 통해 그 위치에 대한 정성적인 성분분석을 동시에 수행할 수 있는 장비임
High Resolution Schottky FE-SEM_x000D_
_x000D_
1 Column_x000D_
1) Electron Gun : High Brightness Schottky Emitter_x000D_
2) Resolution : SEI : 1.0 nm or better _x000D_
BEI : 2.0 nm or better _x000D_
Low vacuum (BEI) : 2.0 nm at 30 kV or better_x000D_
_x000D_
3) Magnification :12 x 1000000 or wider _x000D_
4) Accelerating Voltage : 200 V to 30 kV or wider _x000D_
5) Probe Current : 12 pA to 100 nA or wider _x000D_
6) Beam Shift : Range: +- 100 um _x000D_
7) Field mode : Allows an extra large field of view_x000D_
8) Depth mode : Provides enhanced depth of focus till 10mm height from bottom of specimen._x000D_
9) Wide Field mode : Provides a macro view of the sample_x000D_
_x000D_
2 Specimen Chamber _x000D_
1) Computer eucentric Motorized Specimen Stage._x000D_
(1) Chamber Size : 200 mm or wider _x000D_
(2) Eucentric Type : 5 axis Fully PC eucentric controlled _x000D_
motorized stages._x000D_
(3) Number of Ports : 10 or More _x000D_
(4) Movements Range : X 70mm motorized or wider_x000D_
Y 60mm motorized or wider_x000D_
Z 45mm motorized or wider_x000D_
Tilt : -15 ° to 70 ° (WD15 mm) & Rotation_x000D_
360 ° continuous motorized._x000D_
(5) Motor accurate ; Less than 1 ㎛