큐엠씨
SLP-100
5년
주장비
생산
광학·전자 영상장비 > 달리 분류되지 않는 광학·전자 영상장비 >
2015-10-15
85,854,520원
고정형
시간별
93,000원
I. 장비의 구성(Configurations of Goods)
1. 시스템 특징(System features)
1) Compact system design for small foot printing
2) Stable transfer system with dual arm robot for high throughput
3) Field proven ArF Excimer laser system
4) Homogenized square beam delivery module
5) X, Y axis precision stage, Z, R(θ) alignment stage
6) Auto focusing and monitoring module by laser displacement sensor and CCD camera
7) Complete automation and control solution with unique software
II. 시스템 구성(System configuration)
1) ArF Excimer laser 1 set
2) Optics module (Beam delivery module) 1 set
3) Precision stage 1 set
4) Vision alignment module 1 set
5) Electrical control module (Controller) 1 set
6) System frame (Clean booth type) 1 set
7) Particle control module 1 set