코리아 바큠테크
KVE-T4000
12년
주장비
시험
기계가공·시험장비 > 반도체장비 > 열증착기
2016-02-19
84,853,860원
고정형
시간별
50,000원
Thermal Evaporator System은 증착하고자 하는 물질(Source)을 Thermal Source(저항체)에 장착하여 AC 또는 DC Power 이용하여 target에 물질을 증착하는 장비이다.
본 시스템은 X-Ray의 중요부분중의 하나인 영상획득 부분의 부품소재 개발에 필요한 flat panel위에 셀레늄 등을 증착하여 X-Ray 디텍터 개발에 사용되어 질 것이다.
또한, 의료기기 중 생체신호진단 및 측정기기 등의 전극제작 및 회로제작에 사용되어 질 것이다.
1. Generator System
1) Ultimate pressure : 5 x 10-7 torr 이하
2) Source : Metal / Organic 혼용
3) Sample Size : 10“ x 10”
4) Substrate Size : Piece to 10“x 10” sample 1sh mountable
5) Uniformity : ±5% 이내
6) Thermal Source : W boat, W heater & Crucible, effusion cell
2. PROCESS CHAMBER : 1 SET
1) Material : SUS304
2) Size : 550(W)x550(D)x600(H) (Front door size)
3) Front Door With Viewport & Shutter : 1 EA
4) High Vacuum Pumping Port : 1 EA
5) substrate mount port :1ea
6) 1" Hole For Thermal Source (Bottom falange) : 8 EA
3. VACUUM PUMPING UNIT : 1 unit
1) Compound Turbo molecular pump & Controller : 1set
- Volume flow rate : 1,100 L/Sec(N2) 이상
- Ultimate pressure : < 7.5 x 10E-9 Torr
- Lubrication oil type / Vertical position mount
2) Oil Rotary Vacuum Pump : 1 EA
- Pumping Speed : 600 L/Min 이상
- Direct Drive Type
3) Main Gate Valve (PNEUMATIC) : 1 EA
4) Roughing & Foreline Angle Valve (PNEUMATIC) : 2 EA
5) Flexible Metal Hose with SUS Tubing Pumping Line
6) Solenoid Valve for Rotary Vent with "TEES" : 1 EA
7) 1/4" Solenoid Valve for Chamber Vent : 1 EA
4. SUBSTRATE ROTATION UNIT : 1 SET
1) Rotation Assembly
- Substrate holder : Piece to 10“x10” sample 1sh mountable
- Rotation gear box & D.C motor control unit
- Rotary Motion feedthrough for substrate rotation
- RMP : 1 ~ 30
5. VACUUM GAUGE CONTROLLER : 1 SET
1) Atmosphere to Vacuum transducer : 1ea
- Reading Range : ATM ~ 5x10E-10 TORR
- Dual filament mini ion gauge sensor, Three setpoint relay, RS-232, 2.75"CFF
2) MicroPirani Vacuum transducer : 1ea
- Reading range : ATM ~ 10E-4 TORR
- RS232 analog interface, SUBD 15pin, NW16
6. THERMAL SOURCE & POWER SUPPLY : 1 SET
1) Thermal(Metal) Source : 4ea
2) High current internal water cooling electrode
- Tungsten Boat(Size : 10 x 100 x 0.3 mm Thick)
- AC power supply : 1ea ․ Output : 3KW
3) Pneumatic shutter(탈부착형, Non-bolting) : 4ea
7. QCM DEPOSITION CONTROLLER UNIT : 1SET
1) QCM deposition controller : 1 ea
2) 6MHz Gold coated crystal sensor