Kla-tencor
Alpha-Step IQ
3년
주장비
분석
물리적 측정장비 > 길이/위치측정장비 > 위치측정장비
2012-03-12
48,795,552원
직접사용
이동형
시간별
200,000원
The Alpha-Step IQ stylus-based surface profiler combines high measurement precision with versatility and economy. Ideal for semiconductor pilot lines and materials research, this advanced surface profiler enables faster process learning and higher yields. With guaranteed 8Ã… (1 sigma) or 0.1% step height repeatability and sub-angstrom resolution, the Alpha-Step IQ surface profiler provides excellent repeatability and performance to analyze and monitor processes.
Alpha-Step precision scanner standard vertical range to 550um with sub-angstromelectronic bit-wise vertical resolution.
- Stylus, 5um - 60 Degree Radius (Other installed stylus optional)
- Maximum scan length: 10mm
- Manual precision X-Y stage, 6.2“ diameter theta table
- Acoustic Isolation hood and vibration isolation supports.
Stylus, 5um - 60 Degree Radius