1.Process a. Process :Organic EL & metal deposition (In-situ process) -. Glove box : UV curing & Packaging -. Loading chamber : Substrate loading & pre-cleaning -. Evaporation chamber : Organic EL, Metal deposition b. Substrate size : 100mm × 100mm c. Throughput : 1 substrate / 1 run 2.Hardware a. Control method : Manual control b. Chamber ultimate pressure -. Loading chamber : ≤ 7×10-7 Torr -. Evaporation chamber #1 : ≤ 5×10-7 Torr c. Effusion cell -. Crucible volume : 4~10cc -. Quantity : 3set -. Power supply : 200W d. Thermal source -. Tungsten boat -. Quantity : 2set -. Power supply : 2kW e. Thickness control : Crystal sensor