키엔스코리아(주)
VK-X200K
5년
주장비
분석
광학·전자 영상장비 > 현미경 > 광학현미경
2012-10-31
209,000,000원
고정형
43,694원
(1) Measurement Unit 1) Monitor Magnification power : 24,000x ~ 200x 2) Objective lenses : (10x, 20x, 50x, 150x) * Nikon 10x / NA=0.3, WD=16.5mm * CF Plan 20x / NA=0.46, WD=3.1mm * CF Plan Apo 50x / NA=0.95, WD=0.35mm * CF Plan Apo 150x / NA=0.95, WD=0.2mm 3) Field of view : 1,350 × 1,012㎛ ~ 12 × 9㎛ 4) Optical system for observation and measurement : Confocal optical system using a pinhole 5) Z drive : *Driving by stepping motor *Display resolution : 0.0005㎛ *Measurement range : 7mm *Repeat accuracy(δ) : 0.0012㎛ 6) Width measurement : *Display resolution : 0.001㎛ *Repeat accuracy(3δ) : 0.02㎛ 7) Display resolution : 2048x1536, 1024 × 768, 1024x64 8) Frame memory : *For images(monochrome) : 1024 × 768 × 16bit *For images(color) : 8bit for RGB each *For height measurement : 1024 × 768 × 24bit 9) Frame rate(Hz) : *Sutface scan : 4 ~ 120Hz *Line scan : 7900Hz 10) Scan type : *Horizontal - Resonant scanner, Vertical - Galvanic scanner 11) Optical zoom : 1 to 8× 12) Auto function : Auto focus, Auto gain, Auto shutter 13) Laser light source for measurement : *Wavelength : Violet laser 408nm *Maximum output : 0.9mW *Laser class : JIS Class214) Detection : PMT 15) Light source for optical measurement : *Lamp : 100w halogen *Operating life : 1000 hours(Average) *Color temperature : 3100K16) Color camera for optical observation : *Image pickup device : 1/3 inch color CCD image sensor *Adjustment : Gain/shutter speed *White balance : AUTO/MANUAL/PUSHSET17) Data processing : PC (OS : Windows 7)18) Power supply rating : *Power supply voltage : AC100 ~ 240V, 50/60Hz *Current consumption : 450 VA Max 19) Weight : * Measurement unit : Approx. 26kg(Head alone : Approx 10kg, when separated) *Controller : Approx. 11kg(2) Display of image and analysis S/W 1) Image display method : Real color super-depth, Real color peak, B/W super-depth, BF, Height, Filter 2) 3D display : Real color, Intensity, Height, Grid, Wire frame, Lighting, contour etc 3) Measurement functions : 2-D measurement, XY measurement, Profile measurement, Line roughness/ Surface roughness measurement, Surface/volume measurement, R-profile measurement, Film thickness measurement, Profile comparative / Automatic width measurement, Average height difference measurement. 4) Image processing functions : Filtering(Enhancement, Edge extraction, Smoothing, Filter for viewer, User filter), DCL/BCL, Level correction, Area extraction, Simplified contour, Fourier transform. 5) Image acquisition method : Scan, Fast, Double etc 6) Image acquisition control : Gamma adjustment, Field curvature setting, Wide dynamic range
(1) For obtaining accurate measurement and high resolution images, it is essential for an instrument to have a measurement principle that only receives reflected light when it is at its focal point and completely eliminates ambient light. (2) In order to observe any kind of microscopic profile, the instrument should be equipped with a linear scale module with a 0.0005 μm resolution for height measurement and also have a 0.012 μm or higher repeatability for height measurement.(3) The frame memory for intensity needs to be 14 bit or higher because that it is necessaryto detect subtle changes in the laser light when understanding samples with different materials or with height differences. In addition, the frame memory for height measurement needs to be 24 bit or higher in order to perform measurement with up to 0.0005 μm resolution for the entire height measurement range.(4) The instrument needs to be able to automatically adjust laser light intensity not only in the X and Y axes but also in the Z axis in order to eliminate differences in measurement values due to user errors.(5) A transparent top surface observation function and area film thickness measurement function are necessary for transparent object measurement such as the surface conditions of transparent objects, transparent film thicknesses, and lower layer conditions.(6) The analysis software needs to be installed on multiple computers for smooth progress of the analysis.