마이다스시스템(주)
MDA-400S
9년
주장비
분석
기타 > >
2012-08-06
40,503,500원
고정형
원
Type PC / PLC control Manual (Mask Aligner)
Mask size up to 7" x 7"
Substrate size piece to 6"
UV lamp & Power 350W & power supply
Uniform beam size 6.25" x 6.25"
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity ~25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ
Options Anti-Vibration table
IR BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.