양전자시스템(주)
LTA-1510EP
5년
주장비
분석
전기·전자장비 > 측정시험장비 > 달리 분류되지 않는 측정시험장비
2012-06-29
589,304,185원
고정형
122,772원
○ 주요사양 1) Hardware specifications 1. Measured subjects - Sample and Size ․200mm round sample for Epi, Diff, SOI ․150mm×150mm square sample for LTPS, CIGS - Detaching stage corresponding 500um and 1,000um - Resistivity ․Detector1(9.6GHz) : 0.35~10,000 ohm․cm ․Detector2(26GHz) : 0.005~0.35 ohm․cm - Lifetime Value ․Detector1(9.6GHz) : 0.01(Minimum time resolution)~40,000us ․Detector2(26GHz) : 0.01(Minimum time resolution)~400us 2. Carrier injection light source - Light source 1 ․Wavelength : 904nm (penetration depth : approximately 30um, photon energy: 1.37eV) ․Spot diameter : 2mm ․Pulse width : 40ns Typ. - Light source 2 ․Wavelength : 349nm (penetration depth : approximately 0.01um, photon energy: 3.56eV) ․Spot diameter : 2mm ․Pulse width : 5ns Typ. 3. Microwave detector unit - Detector unit 1 ․Oscillator : Gunn diode 9.6GHz 100mW ․Detector : Crystal diode - Detector unit 2 ․Oscillator : Gunn diode 26GHz 200mW ․Detector : Differential Crystal diode 4. Combination of laser and microwave detection unit - 904nm-9.6GHz : for measurement of bulk wafer - 349nm-9.6GHz : for surface measurement of bulk and SOI wafer - 349nm-26GHz : for measurement of epitaxial wafer and thin films 5. Measurement capability - Measurement time ․Mapping measurement : less than 20 minutes/200mmφ wafer → conditions Pitch: 1mm Averaging time:1 Measurement point : approx. 30,000(with the sample of the 1/e lifetime of less than 100us) * Measurement time depends upon the lifetime value * Handling and alignment time is not included ․Repeatability → Less than ±3%(904nm-9.6GHz) : As per standard bulk wafer at 23 ± 2 deg. → Less than ±5%(349nm-10/26GHz) : As per standard bulk/Epi wafer at 23 ± 2 deg. 6. Utilities - Power source : AC 115 ± 10V, 15A 50/60Hz or AC 230±20V, 7.5A 50/60Hz ․3P(2P+E) terminal block(M4 Screws) - Air : 0.5~0.7 Mpa, more than 1 NL/Min ․Joint :1/4 inch SWAGELOK - Vacuum : 8~34 kPa, More than 20 NL///min ․Joint :1/4 inch SWAGELOK 7. Dimension and Mass - Overall dimensions : 800(W)×1,250(D)×1,300(H) mm - Mass : Approx. 300kg 8. Others - Operating environment ․Temperature:23+/-2deg. ․Humidity:30-60% - Matters to be attended to when installation ․The system is equipped with the precision parts such as microwave oscillator, etc. Therefore, installation in clean room is recommended. - Exhaust ․There are intakes in the upper part of both sides of the system and air is ventilated to the exhaust opening under the system with fan. ․Temperature of exhausted air is 35 degrees Celsius or less. 2) Software Specifications - Initialize: Produces system origin and initializes the parameter. - File Utility: Reads the saved data and prints out. - Parameter Measurement : Parameter measurement is available by setting measurement parameters (coordinate, and pitch, etc.) Setting parameters can be saved and called as the recipes - Recipe Measurement: Recalls and measures the registered recipe in advance. Measurement parameter cannot be changed. - Maintenance: Each part can be individually operated for daily maintenance. - Arbitrary coordinates measurement: 1 ~ 50points, arbitrary coordinate points - Mapping Measurement: 0.5, 1, 1.5, 2, 3, 4, 5, 10, 15, 20 [mm] pitch - Distribution (12 grades) and histogram of Lifetime value, mean, minimum, maximum, standard deviation and median. - Display of Measurement Results : Arbitrary coordinate measurement results Displays coordinate, Lifetime value, and decay curve at measurement points - Mapping measurement results: Displays distribution (12 grades) and histogram of Lifetime value, mean, minimum, maximum, standard deviation and median. - Printout and Data Save 3) Laser Class and Safety Management - The equipment falls under the product with class 1 level laser. - As Safety Preservation Measures based on Interlock Mechanism JIS C6802 (2005) [Radiation Safety Standards for Laser Products] 4) Partial Measurement - Software: Various measurement areas with circle pattern or square pattern can be set arbitrarily. This makes it possible to measure edge portion of wafer only. - Partial Display Software: The file-saved map data are displayed with arbitrary areas magnified. - Wafer Alignment Function: Noncontact centering and "OF (notch) by an optical method matches are done. - Detaching Stage: To measure a special sample, several kinds of stages can be exchanged. - A little thick wafer can be measured by exchanging stages. - Phase Adjustment: To measure a special sample by measuring 26G channel, the phase of the microwave can be operated by manually. - Signal Tower : 3 or 4 colors are available.
○ 특징(1) 본 장치는 Microwave PCD 방법을 사용함으로써, carrier recombination lifetime 측정에 사용됨(2) Full cell을 만들지 않고 제조된 흡수층 박막의 품질을 판단할 수 있으며, 공정 feed-back을 통하여, 공정개선에 활용할 수 있음○ 구성 및 성능 (1) Instrumentation (2) Stage (3) Touch panel display (4) computer (5) Printer