브이티에스
VTPCS1000
4년
부대장비(부가장치) (주장비:고출력 전자빔 발생 시스템)
시험
광학·전자 영상장비 > 광파발생/측정장비 > 달리 분류되지 않는 광파발생/측정장비
2012-05-17
58,200,000원
고정형
기타
999,999,999원
열.환경 차폐성 마이크로/나노 복합 구조 세라믹코팅기술 (소재원천기술개발사업)
1) System control
-. Semi automatic and fully automatic control by control unit and PC (or work-station)
-. Base operating control PLC/1set
-. Emergency operating control PLC/1set
-. Beam control & Pattern observation PC/1set
-. All electronic device protection circuit application & Correction by secondary electron
-. Dual monitor
-. RS-232 Interface
-. Digital In/Out board(50CH)
-. Analog In/Out board
-. Programmable analog out board/2set
-. Temperature indicator(24CH)
-. Operating program
2) Function
-. Pre-vacuum
-. High vacuum
-. Vent system
-. With interlock safety function
-. With main switch including emergency stop function
-. Beam pattern program
-. Beam power & limit setting
-. Process recipe programming
-. Step control auto mode
3) System frame
-. Using thermal treated paint & Easily movable foot master
-. Material : Electro-polished 304 stainless steel(Thermal treated paint)
-. Shape : Control rack type / individual control units
4) Control unit
-. 19" standard control panel mountable
-. Each control units installed
5) Program source provided
열.환경 차폐성 마이크로/나노 복합 구조 세라믹코팅기술 (소재원천기술개발사업)
1) System control
-. Semi automatic and fully automatic control by control unit and PC (or work-station)
-. Base operating control PLC/1set
-. Emergency operating control PLC/1set
-. Beam control & Pattern observation PC/1set
-. All electronic device protection circuit application & Correction by secondary electron
-. Dual monitor
-. RS-232 Interface
-. Digital In/Out board(50CH)
-. Analog In/Out board
-. Programmable analog out board/2set
-. Temperature indicator(24CH)
-. Operating program
2) Function
-. Pre-vacuum
-. High vacuum
-. Vent system
-. With interlock safety function
-. With main switch including emergency stop function
-. Beam pattern program
-. Beam power & limit setting
-. Process recipe programming
-. Step control auto mode
3) System frame
-. Using thermal treated paint & Easily movable foot master
-. Material : Electro-polished 304 stainless steel(Thermal treated paint)
-. Shape : Control rack type / individual control units
4) Control unit
-. 19" standard control panel mountable
-. Each control units installed
5) Program source provided