Gatan
950Solarus
10년
주장비
시험
기계가공·시험장비 > 반도체장비 > 식각장비
2012-03-21
120,000,000원
고정형
원
A. Features :
1. The Solarus Advanced Plasma System is a low power hydrogen and oxygen-radical generator producing glow-discharge plasma within the generator housing. The hydrogen and oxygen-radicals disperse from the generator by convection passing over and around the specimen/ specimen holder tip to clean hydrocarbons from the surface. The process produces H2O, CO2 and CO gases that are pumped away by the vacuum system.
2. Solarus incorporates a multi-stage diaphragm pump backing a turbo molecular drag pump to assure fast, reliable pumping. The pump package enables Pump and Vent cycles of less than minutes, coupled with cleaning times of 1-2 minutes. Generating full cycle cleaning in less than four minutes.
3. The unique H2/O2 recipe prevents/lessens buildup of contamination after about 1 minute of cleaning and even the worst burned-on contamination takes< 10 minutes. Holey carbon films have been cleaned in this recipe for more than 9 minutes without damage. Alternate Ar/O2(Ar 75% - O2 25%) recipes can also be selected.
4. The hardware offers faster cycle times and a much broader range of sample cleaning options. Two front ports accept TEM adaptors compatible with all side-entry TEM or SEM specimen holders. Top loading chamber entry accepts multiple SEM stubs and large irregular shaped samples.
5. The electronics subsystem offers a powerful RF power supply, an auto-tuning RF match network and mass flow controllers.
6. A touch screen interface offering one touch operation through user programmable recipes provides greater flexibility and repeatability than anything the competition offers.
B. System requirements :
1) RF power range : 50 Watt ~ 100 Watt adjustable (13.56 MHz)
2) Auto controls : Full Auto Tuning, Auto Networking, Self Cleaning and Self diagnosis.
3) Software : Ethernet or Flash Card update to maximize functionality without returning to the factory. (Guaranteed 10 years)
4) Unique recipe : High performance H2/O2 plasma recipe.
5) Faster Pump Down : Cleaning cycle begins in ~50 seconds compared to ~3 minutes.
6) Faster Vent to Atmosphere : Sample extraction in ~5 sec compared to ~ 6 min.
7) Touch Screen Technology : Provides greater flexibility and repeatability with detailed system information displaying cleaning cycle status.
8) Multi-Language Support
9) TEM Holders for front port & SEM samples for top loading chamber (3.5” x 2.0”)