Aist-nt
SmartSPM1000
10년
주장비
분석
광학·전자 영상장비 > 현미경 > 주사탐침현미경
2012-03-13
149,988,780원
기관의뢰 직접사용
고정형
기타
10,000원
주사탐침 현미경은 원자 분자 수준의 분해능을 가지고 있는 표면 계측 장비로서 나노 특성 분석에 널리 활용되고 있다.
캔틸레버에 달린 나노 크기의 예리한 바늘이 시표 표면을 근접 할때 시료와 탐침 사이에 상호작용하는 물리량을 측정한다.
1) Scanning range: basic 100 x 100 x 15 μm, 3x3nm~5x5cm(with stitching) measurement area without scanner change. Software-controlled switch to the low-voltage mode for high resolution measurements.
2) XYZ-cross-talk; Minimized through parallel X,Y and Z motion translation
3) Scanner resonance; Resonant frequencies are 7kHz in XY & 15kHz in Z
4) Scan speed up to 50 Hz line speed with AIST digital Digiscope controller
5) Closed Loop Control Capacitive sensors
6) Sensor noise Z: <0.04nm RMS in 1000Hz bandwidth
7) Sensor noise X, Y; 0.1nm RMS in 200Hz bandwidth
8) Open loop noise floor X, Y; 0.02nm RMS in 100Hz bandwidth
9) Open loop noise floor Z: 0.03 nm
10) Closed loop operation down to 100 nm scan size.
11) XY non-linearity 0.03%
12) Z non-linearity 0.03%
13) Motorized sample positioning X,Y; 5x5 mm
14) Dark-room & glove-box compatible; (fully motorized adjustment, XY sample positiong and approach)
15) Best optical resolution 0,4μm
16) ADC/DAC; 3 x 16 bit DAC, 2 x 18 bit ADC 500kHz
17) Cantilever deflection registration by 1300 nm wavelength infrared laser
18) Cantilever actuation ; up to 5 MHz
19) Cantilever registration ; up to 5 MHz
20) Vertical spring constant calibration (Sader & Thermal noise method)
21) Motorization of adjustment and positioning 100% (no handles and knobs)
22) Conductivity measurement(optional)- Current Range: 100fA/10microA
23) Vibration Protection: Passive vibration protection table should be supplied with the SPM.