FEI COMPANY
Nova200 NanoSem
4년
주장비
분석
광학·전자 영상장비 > 현미경 > 주사전자현미경
2006-01-12
460,836,039원
기관의뢰
고정형
시간별
58,000원
전자총에서 발생시킨 전자빔을 집속시켜 시료에 주사하여 방출되는 전자를 검출함으로써 광학 현미경으로는 측정이 불가능한 시료의 미세영역을 고분해/고배율로 확대하여 시료의 표면 구조 및 형상, 구성 성분을 관찰 할 수 있는 장비이다.
구성및성능(1) Secondary electron image resolution - High-vacuum: 1.0 nm at 15 kV, 1.8 nm at 1 kV - Low-vacuum: 1.8 nm at 3 kV 1. Scanning Electron Microscope 1) Column (1) Secondary electron image resolution - High-vacuum: 1.0 nm at 15 kV, 1.8 nm at 1 kV - Low-vacuum: 1.8 nm at 3 kV (2) Magnification : 25 ~ 600,000? or wider (3) Accelerating voltage : 0.2 ~ 30 kV, continuously adjustable (4) Beam Current : - High-resolution : up to 10 nA (5) Gun source : Schottky field emitter (6) Investigation : conductive, non-conductive and high-vacuum incompatible materials at both of high and low vacuum - High vacuum: typically 10-5mbar - Low vacuum : < 200 Pa (7) Detector : - SE and BSE detection at both high and low kV’s - SE for imaging of non-conductive or contaminating samples - IR-CCD camera for in-chamber viewing (8) Specimen stage - X Movement : 0 ~ 50 mm (motorized) - Y Movement : 0 ~ 50 mm (motorized) - Z Movement : 0 ~ 25 mm (motorized) + 25 mm (manual) - Tilt angle : +75 degrees to 15 degrees (manual) - Tilt eucentric at analytical working distance of 5 mm (9) Heating stage - Heating temperature : Max 400 ℃ - Heating range : 20 x 20 mm 2) Display (1) Image display system : flicker-free image presentation at all scanning speed (2) Image resolution : 3584x3094 pixels or better (3) Frame memory : 1024 x 884 pixels or better (4) Electronic scan rotation : n x 360 degrees (5) Minimum dwell time : 50 ns/pixel (6) Image save : - TIFF, BMP or JPEG file formats - Dynamic image : avi format (640x480 pixels or better) or others available at conventional dynamic image viewer (7) Display monitor : 19 inch LCD 3) Vacuum pump system (1) Vacuum sequence : Fully automatic evacuation (2) Required oil-free vacuum system for easy maintenance (3) Turbo-molecular pump or better (4) Ion-getter pump or better (5) Scroll pump or bett