뉴텍웨이브
NWT1200
10년
부대장비(부가장치) (주장비:유기금속화학증착장비)
생산
기계가공·시험장비 > 반도체장비 > 달리 분류되지 않는 반도체장비
2006-05-08
84,480,000원
직접사용
고정형
시간별
4,224원
과제명 : 반도체광원 시험생산 기술지원사업
과제책임자 : 김왕기
장비 spec
이 장비는 진공장비의 잔류가스를 burn ,wet 공정으로 처리하여
배출하는 설비이다.그리고 별도의 장비로 사용은 불가하고 장비의 부속 장비일 뿐이다.
Burn(HEATING)+BURN&WET SCRUBBER
This scrubber is Heating+ Burn+Wet type.
The structure are follows.
1) Burning : Oxidation Reactor.
- Reactor : inconel 600, 7t
- inner dia. : 8inch
- Reactor Head Unit : stainless Steel 310L.4T
- Heater : Kantanl 1200.
- Swirl Unit, Stainless Steel 316L
2) Main Wet Scrubber
- one body type of Circulation tank in scrubber
- auto cleaning system
- Exhaust : Demister unit (Stainless Steel 316L)
- Wet Scrubber : 100% stainless Steel 316L
- Circulation Pump : Teflon
or
- 3 stage wet scrubber
(Quench/Weir + Cyclone + Pack tower)
- Water Re circulation System (WRU)
- Exhaust : Demister unit (Polypropylene)
- Wet Scrubber : Polypropylene, PVC
- Circulation Pump : Teflon
3) Control System
PLC control and TFT-LCD touch screen system
Heater Power detection system
SCR Heater power control system
Automatic power control
Temperature control
C/W temperature control
or
- PLC control and LCD status monitor system
- FMS(Flame Management System)
- Fuel/air differential pressure gauge
- Plenum chamber pressure gauge
- Electrical supply isolator
- Emergency stop switch
- Plenum chamber temperature display
- Combustion chamber temperature display
- Quench outer temperature display
- Status lamp
- Reset button
- Start/stop switch
- Key lock
4) Interlock System
Heater power
Air flow
water flow
Circulation &Water line System Leak
BURNING : OXIDATION REACTOR
MAIN WET SCRUBBER
CONTROL SYSTEM
INTERLOCK SYSTEM
TATAL GAS TREATMENT VOLUME 1200 SLM (H2 :200 SLM , or H2 100 SLM + NH3 : 100 SLM)