Veeco Touson
Wyko NT1100
5년
주장비
계측
물리적 측정장비 > 길이/위치측정장비 > 길이측정장비
2006-07-24
97,939,687원
고정형
건별
30,000원
특징
- Non contact, three dimensional measuremetn - Focus : motorized manual and auto - Scanning white light and optical phase shifting interferometry
활용분야
MEMS : Micro structure , mirror array 측정 Wafer roughness, surface 측정
▣ Measurement Techniques : Optical phase-shifting and white light vertical scanning interferometry.
▣ Measurement Capability : Non-contact 3D surface profile measurements
▣ Objectives : 5x, 10x and 50x ESD Compliant
▣ Field-of-View Lenses : 0.5x, 1x and 2x
▣ Measurement Array : User-Selectable, maximum array 736 x 480
▣ Stage : Manual +/- 50.8mm X/Y translation, +/- 4 degrees tip/tilt
▣ Optical Assembly : Integrated illuminator, interchangeable discrete FOV lenses, Closed loop precision vertical scanning assembly.
▣ Turret : Quadruple Turret, Manual
▣ Standards : Reference Mirror for Phase-Shifting and 10um Step Height for Vertical Scanning.
▣ Computer System : At least Pentium4 3.2GHz Processor with 80GB HDD, CD-RW, 1GB RAM.
▣ Software : Running under Microsoft Windows XP.
▣ Measurement Techniques : Optical phase-shifting and white light vertical scanning interferometry.
▣ Measurement Capability : Non-contact 3D surface profile measurements
▣ Objectives : 5x 10x and 50x ESD Compliant
▣ Field-of-View Lenses : 0.5x 1x and 2x