MBRAUN
Spin coater, glove box
10년
주장비
생산
기계가공·시험장비 > 반도체장비 > 달리 분류되지 않는 반도체장비
2006-08-17
65,156,895원
고정형
건별
40,000원
특징
"- Spin coater - 수분(1ppm이하)과 산소(1ppm이하) 차단용 glove box"
Maker / Model : Unilab / MBraun
Application
Available thin film of high molecular weight electrode material
Production of high molecular weight LED device
Protection of thin film from moisture and O2
Equipment Performance
Available wafer 4 inch
Spin coater inside glove box
: < 1ppm H2O, <1ppm O2
Spin speed : Max 6000 rpm
Dimension : 1140(W) × 750(L) × 1415(H)
Process Performance
Atomic force microscope(tapping mode) images of TIPS-pentacene films spin coated
at 1500 rpm from 0.5wt toluene sloution.
Application
Available thin film of high molecular weight electrode material Production of high molecular weight LED device Protection of thin film from moisture and O2 Equipment Performance
Available wafer 4 inch Spin coater inside glove box : < 1ppm H2O <1ppm O2
Spin speed : Max 6000 rpm
Dimension : 1140(W) × 750(L) × 1415(H)