알파플러스
alpha-plus
주장비
생산
기계가공·시험장비 > 반도체장비 > 달리 분류되지 않는 반도체장비
2006-08-04
242,500,000원
고정형
건별
150,000원
특징 - Deposition material : Organic, Metal - Thickness uniformity : ≤± 3% - Effusion Cell - Substrate size : 4 inch wafer 활용분야 저분자량 유기 반도체 물질과 금속 진공 증착 aker / Model : α-plus Application Deposition of low molecular weight organic semiconductor material and metal Deposition of OTFT process . Available of Flexible Display, Solar Cell, Bio-Sensor, Flexible RF-ID etc Equipment Performance Deposition thickness : several ㎛ Thickness uniformity : ≤ ± 3.0% Available substrate size 4 inch Deposition materials : organic & metal. Deposition control : effusion cell type(OMBD), Tungsten boat type(Metal) Substrate rotation speed : 0~30rpm
OTFT 제작용 유기 증착