ZYGO
NV6300
10년
주장비
분석
물리적 측정장비 > 길이/위치측정장비 > 달리 분류되지 않는 길이/위치측정장비
2006-12-28
214,000,000원
고정형
건별
20,000원
백색광과 시료 표면의 간섭 현상을 이용한 3차원 표면 형상 측정 장비
◈ Technology : Patented scanning white light interferometry◈ Objectives : 1X, 2X, 2.5X, 5X, 10X, 20X, 50X, and 100X◈ Image Zoom : Motorized and configurable system zoom◈ field zoom lenses available : 0.5X, 0.75X, 1.0X, 1.5X, 2.0X◈ Field-of-View : Selectable from 0.04 to 17.5 millimeters◈ Illuminator : White light, long-life LED w/selectable coherence◈ Stages : Motorized Z with 100 mm, ¡¾4◈ tip/tilt, ¡¾3 in. X/Y◈ Vertical Resolution : Up to 0.1 nm◈ Lateral Resolution : 0.45 to 11.8 ?m◈ Scan Speed : ¡? 85 ?m/s◈ Step Height Accuracy : ¡? 0.75%◈ Step Height Repeatability : ¡? 0.1%◈ Vertical Scan Range : Up to 15 mm◈ Frequency domain analysis (FDA)