알파플러스
SPS-3075
10년
주장비
시험
기계가공·시험장비 > 반도체장비 > 스퍼터
2006-05-08
103,148,400원
기관의뢰
고정형
일별
100,000원
1, CHAMBER - Material: Electro-polished SUS304 - Shape & size: A hinged front door with 6 inch window, Φ16.5 inch x H 630 mm - Sample (un)loading: Manual from front door or sample transfer - Port: View, Pumping, Gauge, Venting, Throttle valve, Substrate, Sputtering gun, etc - 6 inch port for loadlock system extension 2. SUBSTRATE HOLDER UNIT - Z-motion: Max. 50mm - Heating element : Non-contact Radiation Heater - Heating power supply - Temperature control stability : ≤ ± 0.1℃ - Substrate temperature: Max. 500 ℃ - Temperature controllers : control modes on/off and PID control 3. MAGNETRON SPUTTERING GUN - Magnetron sputtering gun (DC, RF) - 3 inch, 3 set - Cooling : Indirect - Magnetic enhancement : Permanent[NdFeB] - Cathode body : OFHC Copper 활용분야RF, DC 스퍼터링 증착법을 통한 금속, 금속산화물 박막 증착 - Alloys and inter-metallic compounds coating - Interleaving parallel and anti-parallel magnetic thin films layers coating - Interleaving conducting, semi-conducting, and insulating layers coating - Reflective and anti-reflective optical coating - Opto-electronic films coating
1, CHAMBER - Material: Electro-polished SUS304 - Shape & size: A hinged front door with 6 inch window, Φ16.5 inch x H 630 mm - Sample (un)loading: Manual from front door or sample transfer - Port: View, Pumping, Gauge, Venting, Throttle valve, Substrate, Sputtering gun, etc - 6 inch port for loadlock system extension 2. SUBSTRATE HOLDER UNIT - Z-motion: Max. 50mm - Heating element : Non-contact Radiation Heater - Heating power supply - Temperature control stability : ≤ ± 0.1℃ - Substrate temperature: Max. 500 ℃ - Temperature controllers : control modes on/off and PID control 3. MAGNETRON SPUTTERING GUN - Magnetron sputtering gun (DC, RF) - 3 inch, 3 set - Cooling : Indirect - Magnetic enhancement : Permanent[NdFeB] - Cathode body : OFHC Copper 활용분야RF, DC 스퍼터링 증착법을 통한 금속, 금속산화물 박막 증착 - Alloys and inter-metallic compounds coating - Interleaving parallel and anti-parallel magnetic thin films layers coating - Interleaving conducting, semi-conducting, and insulating layers coating - Reflective and anti-reflective optical coating - Opto-electronic films coating