한미산업
INSIS-AF
5년
주장비
계측
기타 > >
2005-03-09
125,747,583원
고정형
26,197원
- XY axis measurement field: 50×50mm- XY axis stage movement resolution: 0.5㎛- Vertical measurement range: 1500㎛±^750)- Vertical measurement resolution: 10nm- Laser spot diameter: 1.9㎛- Maximum scanning speed: 60mm/sec
- 시편을 통해 반사되는 빔을 측정하여, 비접촉으로 표면형상을 측정- The Newest & High Quality Dynamic Autofocusing Laser Sensing Method. - Optional other type sensor(Tactile sensor, AFM, CHR, Confocal, White Light Interferometer, Triangulation sensor) can be used in this system after the operator remove main autofocus laser sensor. Please be aware that for each of the sensors a special fixture and software is necessary. - Standard Autofocus Laser sensor including microscope and camera for fast and easy positioning of the sensor at the area to be measured. The visible area has a size of 800×600㎛. - Granite base plate with granite bridge. - DC driven XY Stages 50×50mm, other stages with larger displacement are possible. In that case a larger granite plate and bridge are necessary. Optionally XY Stage can be extended upto 100×100, 200× 200, 1000×1000mm - All necessary control units and electronics