에이디에스테크놀로지
YS-5200
9년
주장비
기타
기계가공·시험장비 > 반도체장비 > 달리 분류되지 않는 반도체장비
2005-12-02
176,000,000원
고정형
시간별
원
반도체 레이저를 패키징하는 장비로서 XYZ, two tilting등 5축의 자동정령을 통하여 최대 출력이 발생하도록 패징징하는 장비임
1. LD chip mounter unit1.1. LD chip mount (manual) - Number of control axis : Three (X,Y,Z) manual stages and two tilting stages - Travel Range of X- and Y-axis : ± 6.5mm - Travel Range of Z-axis : ± 12.5mm - Travel Range of Tx-axis : ± 5° - Travel Range of Ty-axis : ± 4° - Resolution of X,Y,Z stage : 10μm - Resolution of Tx, Ty : ≒33", ≒24" - Travel Guide : V-Groove and Crossed Roller - Positional Accuracy (Pitch) : within 25" - Positional Accuracy (Yawing) : within 15"1.2. Probe stage (manual) - Number of control axis : Three (X,Y,Z) manual stages - Travel Range of X-, Y-, and Z-axis : ± 3.2mm - Resolution of X,Y,Z stage : 10μm - Travel Guide : V-Groove and Crossed Roller - Positional Accuracy (Pitch) : within 30" - Positional Accuracy (Yawing) : within 20"2. 2 components auto alignment unit 2.1. 1st & 2nd Axis(5축 자동, motorized) - Number of control axis : Three (X,Y,Z) motorized stages and two tilting motorized stages - Three (X,Y,Z) motorized stages is controled with linear scale feedback. - Travel Range of X-axis : 60mm - Travel Range of Y-axis : 20mm - Travel Range of Z-axis : 30mm - Travel Range of Tx-axis : ± 8° - Travel Range of Ty-axis : ± 6° - Resolution of X,Y,Z stage : 0.05μm - Repeatability of X,Y,Z stage : within ± 0.3μm - Maximum speed of X,Y,Z stage : 10mm/sec - Resolution of Tx, Ty : 0.003°, 0.0015° - Repeatability of Tx, Ty : within ± 0.005° - Travel Guide : V-Groove and Crossed Roller - Positional Accuracy (Pitch) : 25" - Positional Accuracy (Yawing) : 20" - Maximum speed of Tx, Ty : 15°/sec