Veeco
RT200ASY
10년
부대장비(부가장치) (주장비:유기금속화학증착장치)
시험
물리적 측정장비 > 온도/열/습도/수분측정장비 > 달리 분류되지 않는 온도/열/습도/수분측정장비
2005-11-12
87,989,000원
기관의뢰 직접사용
고정형
시간별
25,000원
Real temp은 reflectometer 와 pyrometer를 결합한 디바이스로 이루어짐.
사양
* spectal wavelength : 930nm (10nm bandwidth)
* Data acquisition rate : 10.4 kHz
* Optical head focus distance : 17inch (430mm) 12inch (305mm)
* Measurement spot size at focus distance : 0.2inch for 12inch distance
0.26inch for 17inch distance
* Viewport type : Tilted viewport 1.33inch conflat flange
* Relectivity measurement : Noise - less than 0.02% on single wafer
* Temperature measurement : 450 to 1200C
Accuracy +-1.5C, Repeatability 1C for T: 500C 이상
* Operation conditions : 500 RPM~1800 RPM
* Dimensions : 4X1.8X 8 inch
* Power Requirements : 115~220 VAC 0.5Amps
* Optical head focus distance : 17inch (430mm) 12inch (305mm)
* Measurement spot size at focus distance : 0.2inch for 12inch distance
0.26inch for 17inch distance